AJA

NT-80

Research Quality: 40% complete

What is it?

The sources describe the AJA NT-80 as a Nautilus Series rotating magnetron source. They state that it uses a configurable magnet array and has been used with segmented, multi-material targets on spinning substrates for direct, variable co-depositions from a single magnetron.

What can it run?

Process applications and technology nodes documented for this tool.

co-deposition on spinning substrates
segmented, multi-material target deposition

What do the numbers mean?

Wafer handling1

co-deposition use: used with segmented, multi-material targets depositing onto spinning substrates for direct, variable co-depositions from a single magnetron^[2]

Performance1

optimization capability: optimize target utilization, uniformity, or intentional non-uniformity^[1]

Configuration & options2

series: Nautilus Series Rotating Magnetron^[1]
magnet array: configurable magnet array^[1]

Interested in this tool?

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the NT-80 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NT-80 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NT-80 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NT-80 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NT-80 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NT-80 is not on record.
Answerable by: an OEM datasheet or a fab qualification report