Tool family
AJA Q2
The AJA Q2 is a loadlocked UHV sputter deposition system with RF and DC sputtering capability, RF substrate pre-treatment, and an in-chamber ion source for substrate cleaning.
Models in this family
The AJA Q2 is a loadlocked UHV sputter deposition system with RF and DC sputtering capability, RF substrate pre-treatment, and an in-chamber ion source for substrate cleaning.
