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AJA

Q2

DepositionAJA Q2 family
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The AJA Q2 is a loadlocked UHV sputter deposition system. The AJA Q2 has RF and DC sputtering capability. The AJA Q2 includes an in-chamber ion source for substrate cleaning.[1][2]

Q2 — cnfusers.cornell.edu
Fig. 01Q2cnfusers.cornell.edu[1]

What it is

The AJA Q2 is a loadlocked UHV sputter deposition system.[1][2]

How it works

The AJA Q2 has RF and DC sputtering capability.[1][2]

The AJA Q2 includes RF substrate pre-treatment and an in-chamber ion source for substrate cleaning.[1][2]

Where it fits in the process flow

General reference — not yet source-verified

The AJA Q2 belongs in thin-film deposition after substrate preparation and before later patterning or device fabrication steps.

The AJA Q2 supports deposition of films for device structures that require controlled material layers.

Applications

The AJA Q2 is used for quantum materials work.[1]

  • quantum computing research
  • creation of next generation quantum devices
  • sputter deposition

What do the numbers mean?

Power & electrical3

Sputtering capability
RF and DC sputtering capability[1]
Accurate?
Substrate pre-treatment
RF substrate pre-treatment[1]
Accurate?
Sputtering capability
RF and DC sputtering[1]
Accurate?

Wafer handling4

Tool type
loadlocked UHV sputter deposition system[1]
Accurate?
Substrate cleaning
in chamber ion source for substrate cleaning[1]
Accurate?
system type
loadlocked UHV sputter deposition system[1]
Accurate?
Ion source
in-chamber ion source for substrate cleaning[1]
Accurate?

Configuration & options10

System name
AJA Quantum Materials Sputter Deposition System[1]
Accurate?
Tool location
106[1]
Accurate?
Compatibility
1E - Silicon Based Materials and Select Dieletrics[1]
Accurate?
Sputter guns
two sputter guns for deposition of various materials[1]
Accurate?
Off-axis sputter guns
two manually adjustable off axis sputter guns for low energy sputter deposition[1]
Accurate?
Primary materials
Aluminum, Niobium, Tantalum and Titanium[1]
Accurate?
tool type
Quantum Materials Sputter Deposition System[1]
Accurate?
sputter guns
two sputter guns for deposition[1]
Accurate?
off-axis sputter guns
two manually adjustable off-axis sputter guns[1]
Accurate?
Sputter guns
two sputter guns and two manually adjustable off axis sputter guns[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Sputtering capabilityRF and DC sputtering capability[1]
  • Substrate pre-treatmentRF substrate pre-treatment[1]
  • Sputtering capabilityRF and DC sputtering[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the AJA Q2?

The AJA Q2 is a loadlocked UHV sputter deposition system.[1][2]

What deposition modes does the AJA Q2 support?

The AJA Q2 has RF and DC sputtering capability.[1][2]

Does the AJA Q2 provide substrate cleaning or pre-treatment features?

The AJA Q2 includes RF substrate pre-treatment and an in-chamber ion source for substrate cleaning.[1][2]

Not publicly documented

The following facts about the Q2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Q2 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Q2 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Q2 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Q2 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Q2 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]cnfusers.cornell.edu — cnfusers.cornell.educnfusers.cornell.edu
  2. [2]AJA Q2 family | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 20, 2026.

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