Waferpedia

Tool family

AJA SBE-6

AJADeposition1 entry

The AJA SBE-6 is a Sputter Beam Epitaxy deposition system that combines sputtering with deposition quality described as rivaling molecular beam epitaxy.

LinkedIn X Email

Models in this family

  1. SBE-6

    The AJA SBE-6 is a Sputter Beam Epitaxy deposition system that combines sputtering with deposition quality described as rivaling molecular beam epitaxy.