AJA
SBE-6
The AJA SBE-6 is a Sputter Beam Epitaxy deposition system. The AJA SBE-6 enables co-deposition or sequential deposition of up to six distinct materials. The AJA SBE-6 uses a quartz crystal monitor for deposition rate calibration from elemental targets.[1][2]
What is it?
Applications
The AJA SBE-6 is used for advanced research and epitaxial film growth.[2]
- Advanced research
- Epitaxial film growth
What do the numbers mean?
Performance1
- Deposition rate calibration
- Quartz crystal monitor provides deposition rate calibration from elemental targets[1]
Configuration & options6
- Deposition capability
- Co-deposition or sequential deposition of up to six distinct materials[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of deposition system is the AJA SBE-6?
The AJA SBE-6 is a Sputter Beam Epitaxy deposition system.[1][3][2][4]
How many materials can the AJA SBE-6 deposit in one configuration?
The AJA SBE-6 enables co-deposition or sequential deposition of up to six distinct materials.[1][3][2]
Does the AJA SBE-6 address cross-contamination during deposition?
The AJA SBE-6 minimizes cross-contamination during co-deposition or sequential deposition.[1][3][2]
Not publicly documented
The following facts about the SBE-6 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SBE-6 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SBE-6 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SBE-6 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SBE-6 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SBE-6 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]SBE-6 — AJA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]web.archive.org — web.archive.orgweb.archive.org
- [4]AJA SBE-6 family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 17, 2026.
Compare with similar tools
View all →
The Applied Materials 0010-13622 is an RF match unit intended for PVD (Physical Vapor Deposition) described as a High Efficiency HE RF Match-Bias.
The Applied Materials 0020 12458 Part is an insulator, side match component for the Hdp-Cvd Ultima Plus system.