Waferpedia

Tool family

AJA TR5313

AJADeposition1 entry

The AJA TR5313 is a triangular magnetron sputtering source designed to optimize deposition uniformity onto a circle of substrates up to 8 inches in diameter.

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Models in this family

  1. TR5313

    The AJA TR5313 is a triangular magnetron sputtering source designed to optimize deposition uniformity onto a circle of substrates up to 8 inches in diameter.