AJA

TR5313

Deposition up to 8-inch diameter substrates AJA TR5313 family

Research Quality: 40% complete

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TR5313 — web.archive.org — Fig. 01TR5313web.archive.org^[1]

Wafer size

up to 8-inch diameter substrates

Optics

used in the ATC-B-3400 mask making tool^[2]

What is it?

The sources page identifies the AJA TR5313 as a specialty triangular magnetron used in ATC-B batch coating systems, including the ATC-B-3400 mask making tool, where it is used for deposition from up to three materials and for optimum uniformity. The source description states that it is designed to optimize deposition uniformity onto a circle of substrates up to 8 inches in diameter.

What can it run?

Process applications and technology nodes documented for this tool.

mask making
uniform deposition onto circular substrate sets up to 8 inches in diameter

What do the numbers mean?

Wafer handling2

description: specialty source designed to optimize deposition uniformity onto a circle of substrates up to 8" Ø^[2]
substrates per batch in cited system: (6) 8" wafers per batch^[2]

Optics & imaging1

use in system: used in the ATC-B-3400 mask making tool^[2]

Configuration & options3

model: TR5313^[2]
type: triangular magnetron^[2]
materials per batch in cited system: up to 3 materials^[2]

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the TR5313 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TR5313 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the TR5313 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the TR5313 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TR5313 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TR5313 is not on record.
Answerable by: an OEM datasheet or a fab qualification report