Tool family
Angstrom Engineering EvoVac
The Angstrom Engineering EvoVac is a load-locked PVD tool for electron-beam evaporation, with additional resistive thermal evaporation, ion-assisted deposition, and sputter deposition capabilities.
Models in this family
The Angstrom Engineering EvoVac is a load-locked PVD tool for electron-beam evaporation, with additional resistive thermal evaporation, ion-assisted deposition, and sputter deposition capabilities.
