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Tool family

Angstrom Engineering NexDep

Angstrom EngineeringDeposition1 entry

The Angstrom NexDep Thermal E-Beam Evaporator is a physical vapor deposition tool that offers e-beam and thermal evaporation, with NexDep 2 also offering ion assisted deposition.

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Models in this family

  1. NexDep

    The Angstrom NexDep Thermal E-Beam Evaporator is a physical vapor deposition tool that offers e-beam and thermal evaporation, with NexDep 2 also offering ion assisted deposition.

    Cited variants

    DesignationGenerationVintageChangesSource
    NexDep 1——Configured for principal e-beam and thermal evaporation.pnf.uchicago.edu[1]
    NexDep 2——Configured for principal e-beam, thermal evaporation, and ion assisted deposition.pnf.uchicago.edu[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]pnf.uchicago.edupnf.uchicago.edu