Applied Materials Centura DPS

Models in this family

1. 

   Centura DPS 2

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Centura DPS 2	—	2004–2007	Sources state different vintage configurations: 2004 with 12" 3 C/H, Poly 2ch / Axiom 1ch, and 2007 with 12" Metal 2ch / ASP 2ch.	Equipment inventory listing[1]

2. Centura DPS 2 G 5
3. Centura DPS 2 G 5 Mesa
4. Centura DPS 2 Mesa T 2

   Applied Materials Centura DPS 2 Mesa T 2 is an etcher described as a poly 3ch / Axiom 1ch system.

5. Centura DPS 2 Poly Dry

   Applied Materials Centura DPS 2 Poly Dry Etcher is a 300mm dry etcher with a DPS metal chamber and 200mm ESC.

6. 

   Centura DPS 4.0 Mainframe
7. Centura DPS Aluminum

   Applied Materials Centura DPS Aluminum Etcher is an 8-inch wafer etcher with DPS R1 metal etch chambers, ASP+ strip chambers, and a fast cool down section.

Sources