Applied Materials
Centura DPS 2 Poly Dry
Applied Materials Centura DPS 2 Poly Dry is a 300mm dry etcher. Applied Materials Centura DPS 2 Poly Dry has a DPS metal chamber with 200mm ESC. Applied Materials Centura DPS 2 Poly Dry uses Windows NT.[1][2]
What it is
How it works
Where it fits in the process flow
Applications
Why won't it start?
Documented failure modes, common issues, and field considerations.
- 23.11.08 1 LL off line
What do the numbers mean?
Gas & chemistry1
Control & software1
Configuration & options11
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- GasO2, CHF3, Ar, CF4, O2/He, He, N2, HBr, CL2, NF3[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Centura DPS 2 Poly Dry are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura DPS 2 Poly Dry are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Centura DPS 2 Poly Dry are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Centura DPS 2 Poly Dry are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Centura DPS 2 Poly Dry is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Centura DPS 2 Poly Dry are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 13, 2026.
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