Waferpedia

Tool family

Applied Materials Centura Giga-Fill

Applied MaterialsDeposition1 entry
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Models in this family

  1. Centura Giga-Fill

    The Applied Materials Centura Giga-Fill is a chemical vapor deposition (CVD) cluster tool designed for sub-atmospheric CVD (SACVD) of borophosphosilicate glass (BPSG) on 200 mm wafers.