Tool family
The Applied Materials / Varian E 500 EHPI is a medium current implanter with a 6 inch wafer size.
The Applied Materials / Varian E 500 HP is an implanter described as a medium current ion implantation system for 8-inch wafers.
The Applied Materials / Varian E 500 EHPI is a medium current implanter with a 6 inch wafer size.
The Applied Materials / Varian E 500 HP is an implanter described as a medium current ion implantation system for 8-inch wafers.