Applied Materials eMax

Models in this family

1. 

   eMax CT Plus

   The Applied Materials eMax CT Plus is a semiconductor etch chamber or dry etcher in the Applied Materials eMax family.

2. 

   eMax CT Plus Dielectric

   Applied Materials eMax CT Plus Dielectric is an etch chamber described with associated RF, bias, pump, gate valve, fiber, and equipment cart details.

3. eMax CT Plus Dry

   Applied Materials eMax CT Plus is a dry etcher described as a 1ch SiN system with 3 loadports and Sidewall configuration.