Tool family
Applied Materials eMax
Models in this family
Applied Materials eMax CT Plus Dielectric is an etch chamber described with associated RF, bias, pump, gate valve, fiber, and equipment cart details.
Applied Materials eMax CT Plus is a dry etcher described as a 1ch SiN system with 3 loadports and Sidewall configuration.
All entries
- eMax CT PlusApplied Materials1 spec
- eMax CT Plus DielectricApplied Materials
Applied Materials eMax CT Plus Dielectric is an etch chamber described with associated RF, bias, pump, gate valve, fiber, and equipment cart details.
CategoryEtch9 specs - eMax CT Plus DryApplied Materials
Applied Materials eMax CT Plus is a dry etcher described as a 1ch SiN system with 3 loadports and Sidewall configuration.
CategoryEtch2 specs