ASM A 400

Models in this family

1. A 400

   The ASM A 400 Furnace is an 8-inch furnace configured for poly/nitride processing.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   A400 (Wet Ox / Wet O)	—	—	Configured for wet oxidation and wet O processes	Equipment inventory listing[1]
   A400 (TEOS / Nitride)	—	—	Configured for TEOS and nitride deposition	Equipment inventory listing[2]
   A400 (Poly / Nitride)	—	—	Configured for poly and nitride deposition	Equipment inventory listing[3]
   A400 (BPSG)	—	—	Configured for BPSG deposition	Equipment inventory listing[4]

Sources