Waferpedia

Tool family

ASML 5500/80

ASMLLithography1 entry

The ASML 5500/80 is an i-line wafer stepper with 500nm resolution, <70nm alignment accuracy, and a 21mm x 21mm field size.

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Models in this family

  1. 5500/80i-Line

    The ASML 5500/80 is an i-line wafer stepper with 500nm resolution, <70nm alignment accuracy, and a 21mm x 21mm field size.