ASML

5500/80

Lithography 4-inch wafers; convertible to 3-inch or 6-inch platforms500nm resolutioni-LineASML 5500/80 family

Research Quality: 30% complete

LinkedIn X Email

5500/80 — nanofab.ece.cmu.edu — Fig. 015500/80nanofab.ece.cmu.edu^[1]

Wafer size

4-inch wafers; convertible to 3-inch or 6-inch platforms

Node / era

500nm resolution

Performance

<70nm^[1]

Optics

500nm^[1]

What is it?

The ASML 5500/80 i-Line Wafer Stepper is described as being set up for 4-inch wafers and convertible to 3-inch or 6-inch platforms. The source also states 500nm resolution, <70nm alignment accuracy, a 21mm x 21mm field size, and 1.3µm depth of focus.

What do the numbers mean?

Wafer handling1

Wafer setup: Set up for 4-inch wafers^[1]

Optics & imaging1

Resolution: 500nm^[1]

Performance1

Alignment accuracy: <70nm^[1]

Dimensions & facilities1

Depth of focus: 1.3µm^[1]

Configuration & options2

Convertible platforms: 3-inch or 6-inch platforms^[1]
Field size: 21mm x 21mm^[1]

Interested in this tool?

Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the 5500/80 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 5500/80 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 5500/80 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 5500/80 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 5500/80 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No publicly documented compatible parts, consumables, or accessories for the 5500/80 are on record.
Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources

[1]nanofab.ece.cmu.edu — nanofab.ece.cmu.edunanofab.ece.cmu.edu
[2]Equipment - Claire & John Bertucci Nanotechnology Laboratory - College of Engineering - Carnegie Mellon University — nanofab.ece.cmu.edunanofab.ece.cmu.edu