Waferpedia

Tool family

ASML Twinscan

ASMLLithography8 entries

Models in this family

  1. The ASML Twinscan 1200 B is a lithography scanner equipped with a Cymer XLA 160 laser, but it is non-operational due to an internal water leak near the lens and has no lens data available.

  2. The ASML Twinscan AT 400 S is an i-line scanner stated to be a 365 nm system from 2001.

  3. ASML Twinscan XT 1950 Hi is a scanner for 12-inch wafers used for 193 nm immersion lithography with 38 nm resolution capacity.

All entries

  1. Twinscan 1200 BASML

    The ASML Twinscan 1200 B is a lithography scanner equipped with a Cymer XLA 160 laser, but it is non-operational due to an internal water leak near the lens and has no lens data available.

    CategoryLithography
    4 specs
  2. Twinscan 1700 i-PASML
    CategoryLithography
    1 spec
  3. Twinscan 1950 i ImmersionASML
    CategoryLithography
    5 specs
  4. Twinscan AT 1100ASML
    CategoryLithography
    6 specs
  5. Twinscan AT 400 S i-LineASML

    The ASML Twinscan AT 400 S is an i-line scanner stated to be a 365 nm system from 2001.

    CategoryLithography
    1 spec
  6. Twinscan AT 750 BASML
    2 specs
  7. Twinscan NXT 1980 iASML
    CategoryLithography
    3 specs
  8. Twinscan XT 1950 HiASML

    ASML Twinscan XT 1950 Hi is a scanner for 12-inch wafers used for 193 nm immersion lithography with 38 nm resolution capacity.

    CategoryLithography
    20 specs