ASML

Twinscan XT 1950 Hi

Lithography ASML Twinscan family

Research Quality: 30% complete

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Twinscan XT 1950 Hi — Inventory photo — Fig. 01Twinscan XT 1950 HiInventory photo^[1]

Power

60 W / 6 khz Laser^[1]

Optics

38 nm Overlay: 4 nm SMO / 7 nm MMO^[1]

What is it?

ASML Twinscan XT 1950 Hi is a scanner for 12-inch wafers used for 193 nm immersion lithography with 38 nm resolution capacity.

What do the numbers mean?

Power & electrical1

Power: 60 W / 6 khz Laser^[1]

Optics & imaging9

Process: 193 mm immersion lithography for 38 nm resolution capacity^[1]
Resolution: 38 nm Overlay: 4 nm SMO / 7 nm MMO^[1]
Throughput: 148 wph (300 mm with 125 exposures at 30 ml)^[1]; Zeiss Starlith 1950 with max NA of 1.35 or equivalent illumination system^[1]; Aerial XP illumination system^[1]; P Type illuminator alignment^[1]; Focus and field by field leveling reticle management^[1]; Load Ports Laser^[1]; 193 nm^[1]

Performance1

Blue alignment - Blue align with Athena narrow marks leveling^[1]

Accurate?

Dimensions & facilities1

Circuit Dependent Focus Edge Clearance^[1]

Accurate?

Configuration & options8

HDD included^[1]

Accurate?

Key Specifications:^[1]

Accurate?

Class 1 environment with semi compliant MENV & FIMS assemblies controls^[1]

Accurate?

UNIX / SUN architecture^[1]

Accurate?

Cymer XLR 560 i:^[1]

Accurate?

With E 95 bandwith monitoring environment^[1]

Accurate?

Standard Capabilities:^[1]

Accurate?

Focus Spot Monitoring^[1]

Accurate?

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Power60 W / 6 khz Laser^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Twinscan XT 1950 Hi are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Twinscan XT 1950 Hi are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Twinscan XT 1950 Hi are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Twinscan XT 1950 Hi are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Twinscan XT 1950 Hi are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Twinscan XT 1950 Hi is not on record.
Answerable by: an OEM datasheet or a fab qualification report