Tool family
ASML Twinscan XT 1400
Models in this family
The ASML Twinscan XT 1400 F Scanner is a 193nm (ArF) lithography scanner stated to handle 12-inch wafers.
The ASML Twinscan XT 1400 F ArF Scanner is a lithography scanner with a process module for 200 mm wafers and a 300 mm conversion kit.
All entries
- Twinscan XT 1400 FASML
The ASML Twinscan XT 1400 F Scanner is a 193nm (ArF) lithography scanner stated to handle 12-inch wafers.
CategoryLithography1 spec - Twinscan XT 1400 F ArFASML
The ASML Twinscan XT 1400 F ArF Scanner is a lithography scanner with a process module for 200 mm wafers and a 300 mm conversion kit.
CategoryLithography9 specs