ASML
Twinscan XT 1400 F ArF
What it is
Where it fits in the process flow
General reference — not yet source-verifiedIn a semiconductor fabrication facility, the Twinscan XT 1400 F ArF is used in the lithography step. The machine is positioned after photoresist coating and before post-exposure bake and development. The scanner is employed for critical and semi-critical layers in the integrated circuit manufacturing flow.
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the process module wafer size of the Twinscan XT 1400 F ArF?
The process module is configured for 200 millimeter wafers.[1][2]
Does the Twinscan XT 1400 F ArF support 300 millimeter wafers?
Yes, the scanner includes a conversion kit for 300 millimeter wafers.[1][2]
What are the electrical power requirements of the Twinscan XT 1400 F ArF?
The scanner operates on 50/60 Hz, 3-phase power at 230/400 VAC, with a power rating of 49 kVA. Full load current is 79 A per phase, largest load is 27 A per phase, and maximum interrupt capacity is 35 kA.[1][2]
What is the family classification of the Twinscan XT 1400 F ArF?
The scanner is part of the ASML Twinscan XT 1400 family.[3]
Not publicly documented
The following facts about the Twinscan XT 1400 F ArF are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Twinscan XT 1400 F ArF are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Twinscan XT 1400 F ArF are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Twinscan XT 1400 F ArF are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Twinscan XT 1400 F ArF are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Twinscan XT 1400 F ArF is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Twinscan XT 1400 F ArF — ASML | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]ASML Twinscan XT 1400 F ArF vs EV Group 101 comparison | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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