Tool family
ASML XT 1900 Gi
ASML XT 1900 Gi Scanner.
Models in this family
The ASML XT 1900 Gi is an immersion scanner described with 193 mm optics, software version 5.1, CIM SECS, and a 40/45 nm process.
Tool family
ASML XT 1900 Gi Scanner.
The ASML XT 1900 Gi is an immersion scanner described with 193 mm optics, software version 5.1, CIM SECS, and a 40/45 nm process.
