Waferpedia

Tool family

Axcelis GSD

AxcelisIon Implantation2 entries
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Models in this family

  1. GSD 01 X

    The Axcelis GSD 01 X is a semiconductor equipment model from the Axcelis GSD family.

  2. GSD 100

    The Axcelis GSD 100 is a high-current ion implanter configured as a GSD 200 E type for 6-inch wafer processing.

All entries

  1. GSD 01 XAxcelis

    The Axcelis GSD 01 X is a semiconductor equipment model from the Axcelis GSD family.

    2 specs
  2. GSD 100Axcelis

    The Axcelis GSD 100 is a high-current ion implanter configured as a GSD 200 E type for 6-inch wafer processing.

    CategoryIon ImplantationWaferNo wafer top-side bar reading
    62 specs