Axcelis

GSD 100

Ion Implantation Axcelis GSD family

Research Quality: 20% complete

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GSD 100 — Inventory photo — Fig. 01GSD 100Inventory photo^[1]

What is it?

Why won't it start?

Documented failure modes, common issues, and field considerations.

Can't produce wafers as is
No Modifications
No SECS II Interface
No fab starter kit
No fast maintenance kit
No wafer top-side bar reading
No real time dose control
No real time beam profiler
No electron shower with gas bleed and closed loop control
No Slot-to-Slot Wafer Integrity (200 mm only)
No Two Axis Variable Implant Angle (+/- 11 Degrees in two axis) (Quad Implant Capability)
No Clean room manuals
No CE Mark
No OEM Audit available
No enhanced low energy beamline
No triple index mass analysis magnet & power supply
No vaporizer
No variable aperture extraction electrode
No three position resolving aperture (90 keV only)
No In-Situ wafer charge monitor
No In-Situ particle detector HYT
No lead floor
No vacuum pumps

What do the numbers mean?

Vacuum & pumping1

Cryo compressors: CTI 9600^[1]

Wafer handling3

Loading Configuration: Open Cassette^[1]; 4 cassette compatibility^[1]; Automatic flat or notch alignment capability with buffer cassette^[1]

Control & software2

Software Version: 6.12.4^[1]; GEM / SECS Interface^[1]

Configuration & options14

High Current: GSD 200 E^[1]
Date of Audit: August 25, 2025^[1]; Automated Beam tuning & setup w/Eaton Autotune^[1]; All cables present^[1]
Beamline version: Standard^[1]
Energy Range: 160 KeV^[1]; Standard manuals included^[1]; NV-GSD 200 Series Process Disk with active cooling & chiller^[1]
Single Stage Extraction: 80 keV^[1]
Post Accel electrode assembly: 80 -160 keV^[1]
Ion Source Type: ELS^[1]
Source Material: Moly^[1]; Flag Farady Injector^[1]; Signal tower^[1]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Cryo compressorsCTI 9600^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the GSD 100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the GSD 100 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the GSD 100 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the GSD 100 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the GSD 100 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the GSD 100 are on record.
Answerable by: an OEM parts catalog or a service engineer