Waferpedia

Tool family

Axcelis NV 6200 A Ion

AxcelisIon Implantation1 entry

Axcelis NV 6200 A Ion Implanter.

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Models in this family

  1. NV 6200 A Ion

    The Axcelis NV 6200 A Ion Implanter is a 6-inch wafer ion implanter.