Waferpedia

Tool family

Axcelis NV GSD HE

AxcelisIon Implantation1 entry

Axcelis NV GSD HE Implanter.

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Models in this family

  1. NV GSD HE

    The Axcelis NV GSD HE is an ion implantation system that can handle 6-inch and 8-inch wafers.