Axcelis
NV GSD HE
The Axcelis NV GSD HE is an ion implantation system. The Axcelis NV GSD HE can handle 6-inch wafers and can be converted to handle 8-inch wafers. The Axcelis NV GSD HE configuration includes an end station, disk module, final energy magnet, linac module, gas box, and source.[1][2][3]
Wafer size
8"
Power
High voltage power supply[1]
Vacuum
Both front and rear Cyro pumps by the OEM[1]
Gas delivery
All gas box elements[1]
What it is
The Axcelis NV GSD HE is an ion implantation system.[2]
How it works
Where it fits in the process flow
Applications
General reference — not yet source-verifiedIon implantation is used to introduce controlled dopant species into semiconductor wafers.
The NV GSD HE is a mature-node wafer implantation tool class suited to semiconductor device fabrication on silicon wafers.
What do the numbers mean?
Power & electrical6
- Complete refurbishment of resonant cavities (LINACs, resonator DI boards and RF power supplies)[1]
- High voltage power supply[1]
- Terminal power supplies (filament, bias, arc, magnet, source magnet)[1]
- Refurbishment
- Complete refurbishment of resonant cavities (LINACs, resonator DI boards and RF power supplies)[1]
Vacuum & pumping9
Wafer handling3
Gas & chemistry4
Configuration & options23
- Refurbished[1]
- Refurbishment of isolation transformer[1]
- All assembly refurbished and fitted with new consumables[1]
- Chamber and beamline CO2 cleaned and diamond polished to return to as-new condition[1]
- Two new SAC IHC ion sources[1]
- System tested to original equipment manufacturers specification[1]
- Replacement of:[1]
- All water lines and fittings[1]
- Pneumatic lines where required (inspected)[1]
- 1 Chamber, 1 Load Port[3]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationComplete refurbishment of resonant cavities (LINACs, resonator DI boards and RF power supplies)[1]
- ConfigurationBoth front and rear Cyro pumps by the OEM[1]
- ConfigurationValves, gate valves, and vacuum valves[1]
- ConfigurationMechanical and booster pumps[1]
- ConfigurationHigh voltage power supply[1]
- ConfigurationTerminal power supplies (filament, bias, arc, magnet, source magnet)[1]
- ConfigurationAll gas box elements[1]
- ConfigurationA low pressure H2 upgrade was performed:[1]
- ConfigurationNo gas stock management[1]
- RefurbishmentComplete refurbishment of resonant cavities (LINACs, resonator DI boards and RF power supplies)[1]
- ReplacementBoth front and rear Cyro pumps by the OEM[1]
- ReplacementValves, gate valves, and vacuum valves[1]
- ReplacementMechanical and booster pumps[1]
- ReplacementHigh voltage power supply[1]
- ReplacementTerminal power supplies (filament, bias, arc, magnet, source magnet)[1]
- ReplacementAll gas box elements[1]
- UpgradeA low pressure H2 upgrade was performed[1]
- UpgradeNo gas stock management[1]
- UpgradeBeam performances similar to H2 pressure technology[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the NV GSD HE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NV GSD HE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NV GSD HE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NV GSD HE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NV GSD HE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NV GSD HE is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]limitekltd.com — limitekltd.comlimitekltd.com
- [4]Inventory photo
Last updated Sep 4, 2026.
