Tool family
Axcelis NV GSD HE Ion
Axcelis NV GSD HE Ion Implanter.
Models in this family
The Axcelis NV GSD HE Ion is an ion implantation system. The Axcelis NV GSD HE Ion supports wafer handling for 6-inch and 8-inch wafers.
Tool family
Axcelis NV GSD HE Ion Implanter.
The Axcelis NV GSD HE Ion is an ion implantation system. The Axcelis NV GSD HE Ion supports wafer handling for 6-inch and 8-inch wafers.
