Axcelis

NV GSD HE Ion

Ion Implantation 6"Axcelis NV GSD HE Ion family

Research Quality: 20% complete

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NV GSD HE Ion — Inventory photo — Fig. 01NV GSD HE IonInventory photo^[1]

Wafer size

Power

60 Hz^[1]

Vacuum

1 MeV^[1]

What is it?

What do the numbers mean?

Power & electrical3

Frequency: 60 Hz^[1]
Phase: 3 phase^[1]
Amp Rating Largest Load: 99 A^[1]

Vacuum & pumping2

Beam Exhaust: 1 MeV^[1]; Vacuum Cassette (17)^[1]

Wafer handling2

Wafer size: 6" Wafer Handling Station Installed^[1]; Dummy Cassette (25)^[1]

Control & software2

Main Computer: Solaris, SW 5.3^[1]
Second Computer: Solaris^[1]

Configuration & options11

Refurbished in 2023^[1]
Full Load Current: 99 A^[1]
Power: 82 kVA^[1]
Input Breaker: 150 A^[1]
Max Interrupt Capacity: 14 kA^[1]
Beam Current: 1 mA^[1]; Notch^[1]; Load Buffer (17)^[1]; Beam Profile Oscilloscope^[1]
Main Monitor: LCD^[1]
Second Monitor: LCD^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Frequency60 Hz^[1]
Phase3 phase^[1]
Amp Rating Largest Load99 A^[1]
Beam Exhaust1 MeV^[1]
ConfigurationVacuum Cassette (17)^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the NV GSD HE Ion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NV GSD HE Ion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NV GSD HE Ion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NV GSD HE Ion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NV GSD HE Ion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NV GSD HE Ion is not on record.
Answerable by: an OEM datasheet or a fab qualification report