Waferpedia

Tool family

Axcelis RapidStrip 210 ES

AxcelisEtch1 entry

Axcelis RapidStrip 210 ES Etcher Asher.

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Models in this family

  1. RapidStrip 210 ES

    Axcelis RapidStrip 210 ES is an etcher/asher system configured for 8-inch wafers.