Waferpedia

Axcelis

RapidStrip 210 ES

EtchAxcelis RapidStrip 210 ES family
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AxcelisRapidStrip 210 ES
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Power

Ozone / Microwave Generator:[1]

Vacuum

VAT[1]

What is it?

Axcelis RapidStrip 210 ES is an etcher/asher system configured for 8-inch wafers.

What do the numbers mean?

Power & electrical1

Ozone / Microwave Generator:[1]
Accurate?

Vacuum & pumping1

Foreline Valve
VAT[1]
Accurate?

Wafer handling3

Can Produce Wafers As-Is[1]
Accurate?
Number of Cassettes
2[1]
Accurate?
Robot Type
Brooks[1]
Accurate?

Control & software1

Software Version
1.8.7.0.06[1]
Accurate?

Configuration & options14

Part Number
1080-6037[1]
Accurate?
System On-Line[1]
Accurate?
CE Mark Certified[1]
Accurate?
All Cables Present[1]
Accurate?
System Configuration:[1]
Accurate?
System Type
RapidStrip 210 ES[1]
Accurate?
Load Type
Standard[1]
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Install Type
Through-the-Wall[1]
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Endpoint Detection Type
Monochromator[1]
Accurate?
Throttle Valve
MKS[1]
Accurate?
Cooling Station[1]
Accurate?
SECS/GEMS[1]
Accurate?
Manufacturer
Matrix[1]
Accurate?
Model
3kW switchmode powergen[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Foreline ValveVAT[1]
  • ConfigurationOzone / Microwave Generator:[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the RapidStrip 210 ES are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RapidStrip 210 ES are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the RapidStrip 210 ES are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the RapidStrip 210 ES are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the RapidStrip 210 ES are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the RapidStrip 210 ES is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing
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Last updated Jul 29, 2026.

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