Waferpedia

Tool family

Bruker Dektak

Models in this family

  1. The Bruker / Veeco Dektak XT is a profilometer with a 4-inch stage, software-controlled movement, a 12.5-micron stylus diameter, and an included enclosure.

All entries

  1. Dektak 150Bruker
    CategoryMetrology & Inspection
    1 spec
  2. Dektak 8Bruker
    CategoryMetrology & Inspection
    1 spec
  3. Dektak XTBruker

    The Bruker / Veeco Dektak XT is a profilometer with a 4-inch stage, software-controlled movement, a 12.5-micron stylus diameter, and an included enclosure.

    CategoryMetrology & Inspection
    4 specs