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Bruker

Dektak XT

Metrology & InspectionBruker Dektak family
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Dektak XT — Inventory photo
Fig. 01Dektak XTInventory photo[1]

  • Plate 01Bruker Dektak XT Demo at IES Technical Sales Danvers MA

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What is it?

The Bruker / Veeco Dektak XT is a profilometer with a 4-inch stage, software-controlled movement, a 12.5-micron stylus diameter, and an included enclosure.

What do the numbers mean?

Control & software2

4" Stage and movement controlled by software[1]
Accurate?
Windows 7 PC[1]
Accurate?

Configuration & options2

Stylus diameter
12.5 Microns[1]
Accurate?
Enclosure included[1]
Accurate?
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What replaced it?

  • siblingKLA D600— Listed in the same metrology equipment section.source[5]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Dektak XT are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Dektak XT are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Dektak XT are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Dektak XT are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Dektak XT are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Dektak XT is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (9)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]epfl.chepfl.ch
  5. [5]epfl.chepfl.ch
  6. [6]Metrology ‒ Center of MicroNanoTechnology CMi ‐ EPFL — epfl.chepfl.ch
  7. [7]Step Profilometer (DektakXT) - UCSB Nanofab Wiki — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
  8. [8]Equipment Descriptions | Stanford Nano Shared Facilities — snsf.stanford.edusnsf.stanford.edu
  9. [9]Surface profiler [BRUKER-profilometer] | Quantum-Nano Fabrication and Characterization Facility | University of Waterloo — uwaterloo.cauwaterloo.ca
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Last updated Jul 29, 2026.

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