Bruker

Dektak XT

Metrology & Inspection 2 in, 4 in, 6 in, 8 in Bruker Dektak family

Research Quality: 70% complete

The Bruker Dektak XT is a stylus surface profiler. The Bruker Dektak XT measures thin and thick film step heights. The Bruker Dektak XT is compatible with wafer sizes of 2 inches, 4 inches, 6 inches, and 8 inches.^[1]

Dektak XT — Inventory photo — Fig. 01Dektak XTInventory photo^[2]

Plate 01Bruker Dektak XT Demo at IES Technical Sales Danvers MA
davesatiesWatch on YouTube
Plate 02DektakXT Stylus Profiler [Application Training Instructional Session]
Kamal A. Shair Central Research Science LaboratoryWatch on YouTube
Plate 03DektakXT Intro Short length.wmv
davesatiesWatch on YouTube

Wafer size

2 in, 4 in, 6 in, 8 in

Performance

5 Å^[1]

Optics

Selectable 1 to 4 mm FOV^[1]

What it is

The Bruker Dektak XT is a stylus surface profiler used for measuring surface topography and thin film step heights.^[5]^[6]

How it works

The Dektak XT measures surface variation by dragging a stylus across a sample surface while the instrument records the vertical motion of the probe.^[5]^[6]

The Dektak XT uses electromechanical scanning with a diamond-tipped stylus linked to displacement sensing and software for data acquisition and analysis.^[5]

The Dektak XT uses a manual sample stage for positioning, leveling, and rotation, and it supports software-based leveling, data display, and analysis.^[5]^[6]

Where it fits in the process flow

The Dektak XT is used when a process needs step-height or depth verification, surface topography checks, roughness evaluation, or stress-related measurement support.^[5]^[6]

Applications

The Dektak XT is used for surface topography measurement and thin film step height measurement.^[5]

The Dektak XT is used for measuring step heights, trench depths, roughness, and stress-related features on microfabricated surfaces.^[6]

Why won't it start?

Documented failure modes, common issues, and field considerations.

High-aspect-ratio trenches can be limited by probe tip shape.

What do the numbers mean?

Wafer handling5

Wafer compatibility: 2 in, 4 in, 6 in, 8 in^[1]
Compatible wafer sizes: 2", 4", 6", 8"^[1]
Wafer Compatibility: 2″, 4″, 6″, 8″ wafers^[1]
Wafer compatibility: 2", 4", 6", and 8" wafers^[1]
Supported wafer sizes: 2 in, 4 in, 6 in, 8 in^[5]

Optics & imaging3

Magnification / Field of View: Selectable 1 to 4 mm FOV^[1]
Selectable magnification: 1 to 4mm FOV^[1]
Field of View Magnification: Selectable, 1 to 4mm FOV^[1]

Performance2

Step-height repeatability: 5 Å^[1]
Step-height repeatability: 5A^[1]

Control & software3

4" Stage and movement controlled by software^[2]; Windows 7 PC^[2]
Software: Windows-based data acquisition, data analysis, and equipment control^[6]

Dimensions & facilities2

Measurement type: Stylus surface profiler for thin and thick film step height^[1]
Measurement purpose: advanced thin and thick film step height measurement^[1]

Configuration & options20

Stylus diameter: 12.5 Microns^[2]; Enclosure included^[2]
Scan length range: 55 mm (with stitching option)^[1]
Vertical range: 1 mm^[1]
Low force (N-Lite+): 0.03 to 15 mg^[1]
3D capabilities: 3D stress and 3D mapping^[1]
N-Lite+ Low Force: 0.03 to 15mg^[1]
3D stress and 3D mapping: Supported^[1]
Tool Type: Stylus surface profiler^[1]
Type: stylus surface profiler^[1]
Low force mode: N-Lite+ Low Force with 0.03 to 15mg^[1]
Measurement modes: 3D stress and 3D mapping^[1]
Model: Dektak XT^[2]
OEM: Bruker / Veeco^[2]
Stylus diameter: 12.5 µm^[2]
Stage: 4 in stage^[2]
Maximum sample diameter: 8 inch^[6]
Maximum sample thickness: 50 mm^[6]
Maximum scan length: 55 mm^[6]
Variable tip force: 0.03 mg to 15 mg^[6]

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What replaced it?

siblingKLA D600— Listed in the same metrology equipment section.source^[7]
siblingKLA P-17— Listed in the same mechanical profilometers section of EPFL's Center of MicroNanoTechnology.source^[8]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What does the Dektak XT measure?

The Dektak XT measures surface topography and thin film step heights.^[5]

What sensing method does the Dektak XT use?

The Dektak XT uses a stylus-based scanning method in which a diamond-tipped stylus moves across the sample surface and the instrument records surface variation.^[5]

Can the Dektak XT measure deep features?

The Dektak XT can measure to a depth of over 1 mm.^[6]

Does the Dektak XT support stress measurement?

The Dektak XT includes a stress measurement option.^[6]

Not publicly documented

The following facts about the Dektak XT are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Dektak XT are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Dektak XT are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Dektak XT are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Dektak XT is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Dektak XT are on record.
Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (10)Every fact above is drawn from these public sources

[1]epfl.chepfl.ch
[2]Inventory photo
[3]Inventory photo
[4]Inventory photo
[5]uwaterloo.ca — uwaterloo.cauwaterloo.ca
[6]wiki.nanotech.ucsb.edu — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
[7]epfl.chepfl.ch
[8]epfl.chepfl.ch
[9]Metrology ‒ Center of MicroNanoTechnology CMi ‐ EPFL — epfl.chepfl.ch
[10]Equipment Descriptions | Stanford Nano Shared Facilities — snsf.stanford.edusnsf.stanford.edu