Waferpedia

Tool family

Canon Anelva

CanonDeposition3 entries
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Models in this family

  1. Anelva C 7100 PVD Cluster

    Canon Anelva C 7100 PVD Cluster is a physical vapor deposition cluster tool with 8-inch wafer handling.

  2. Anelva EC 7001
  3. Anelva ILD 4100 SR Dry

    The Canon Anelva ILD 4100 SR is a dry etcher for 8-inch wafers.

    Cited variants

    DesignationGenerationVintageChangesSource
    ILD 4100 SR—1996—Equipment inventory listing[1]

All entries

  1. Anelva C 7100 PVD ClusterCanon

    Canon Anelva C 7100 PVD Cluster is a physical vapor deposition cluster tool with 8-inch wafer handling.

    CategoryDeposition
    10 specs
  2. Anelva EC 7001Canon
    CategoryDeposition
    4 specs
  3. Anelva ILD 4100 SR DryCanon

    The Canon Anelva ILD 4100 SR is a dry etcher for 8-inch wafers.

    CategoryEtch
    1 spec

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing