Canon FPA 5500

Models in this family

1. 

   FPA 5500 iZ+ i-Line

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   FPA 5500 iZ+ i-Line Stepper	i-line	2004–2004	—	Equipment inventory listing[1]
   FPA 5500 iZ	i-line	2001	Listed as Canon FPA 5500 iZ i-Line Stepper - 350nm.	Equipment inventory listing[2]

2. FPA 5500 iZa i-Line

   The Canon FPA 5500 iZa is an i-line stepper lithography system for 8-inch wafers.

3. 

   FPA 5500 iZa MUV

Sources