Waferpedia

Tool family

Canon FPA 5510

CanonLithography2 entries
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Models in this family

  1. FPA 5510 IX
  2. FPA 5510 iZ i-Line

    The Canon FPA 5510 iZ is an i-line stepper for 12-inch wafer processing.

All entries

  1. FPA 5510 IXCanon
    CategoryLithography
    20 specs
  2. FPA 5510 iZ i-LineCanon

    The Canon FPA 5510 iZ is an i-line stepper for 12-inch wafer processing.

    CategoryLithography
    4 specs