Canon
FPA 5510 IX
What it is
Where it fits in the process flow
General reference — not yet source-verifiedLithography steppers are used after wafer preparation and photoresist coating and before development, etch, implantation, or deposition steps that use the patterned resist image. A stepper fits into the pattern-transfer portion of the process flow where repeated layer-to-layer alignment is required. The tool is used in conjunction with track processing and with downstream pattern transfer modules.
Applications
General reference — not yet source-verifiedLithography steppers are applied to the formation of patterned resist images that define subsequent process areas on semiconductor wafers. Such tools are used for repeated layer patterning across device fabrication flows, including levels that require accurate registration to previously formed features.
Why won't it start?
Documented failure modes, common issues, and field considerations.
- No hard disk
- Missing parts are listed in the source, including OAS Scope, SCH, 8 Robot, SCH Cermaic Hand, ALS ND 1, ALS ND 2, i-line Sub Filter, Laser Head, Indexer 1 & 2 (2ea), SCH-Z Unit, PA Unit, SH Unit, RCS PCB, Reticle Robot Hand, Switching Regulator, 1500 PDU Driver, SMIF-X Motor Driver, SMIF-X ACMD-IF PCB, Main Shutter, Exposure Shutter, Hg_ Lamp Stage, IP6 PCB, Cameralink Relay Cable (0.1M), ALS Unit, WS Linear Motor, and Power Module
What do the numbers mean?
Wafer handling3
Optics & imaging1
- Laser Head[1]
Configuration & options16
- No hard disk[1]
- Some missing parts:[1]
- OAS Scope[1]
- SCH Cermaic Hand[1]
- ALS ND 1[1]
- ALS ND 2[1]
- i-line Sub Filter[1]
- SCH-Z Unit[1]
- PA Unit[1]
- SH Unit[1]
- RCS PCB[1]
- Switching Regulator[1]
- 1500 PDU Driver[1]
- SMIF-X Motor Driver[1]
- SMIF-X ACMD-IF PCB[1]
- Main Shutter[1]
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Nikon NSR-2205i11D— Same function class: Lithography, UnknownCompare in depthsource[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the FPA 5510 IX are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FPA 5510 IX are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the FPA 5510 IX are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the FPA 5510 IX are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the FPA 5510 IX is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the FPA 5510 IX are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]chiphistory.orgchiphistory.org
- [3]https://downloads.canon.com/nw/pdfs/industrial/fpa-5510ix-stepper-specs.pdf — downloads.canon.comdownloads.canon.com
- [4]FPA 5510 IX — Canon | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 17, 2026.
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