Waferpedia

Tool family

Cascade Microtech EPS150

The Cascade MicroTech EPS150 Triax is a probe station configured with a Keithley 2450 SMU and an Agilent LCR meter for electrical measurements.

Models in this family

  1. The Cascade MicroTech EPS150 Triax is a probe station configured with a Keithley 2450 SMU and an Agilent LCR meter for electrical measurements.