Waferpedia

Tool family

CEE 100

CEE4 entries
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Models in this family

  1. 100

    The CEE 100 is a lithography spin coater/developer tool that accepts up to 6-inch wafers and supports programmable multi-step processing.

  2. 100 CB Spin
  3. 100 CB Spin Coater Hot Plate

    The CEE 100 CB is a spin coater/hot plate with a flow controller.

  4. 100 Spin

    The CEE 100 is a spin coater with a listed power specification of 115 volts and 800 watts.

All entries

  1. 100CEE

    The CEE 100 is a lithography spin coater/developer tool that accepts up to 6-inch wafers and supports programmable multi-step processing.

    CategoryLithographyWafer6"
    6 specs
  2. 100 CB SpinCEE
    CategoryDeposition
    1 spec
  3. 100 CB Spin Coater Hot PlateCEE

    The CEE 100 CB is a spin coater/hot plate with a flow controller.

    1 spec
  4. 100 SpinCEE

    The CEE 100 is a spin coater with a listed power specification of 115 volts and 800 watts.

    2 specs