Waferpedia

Tool family

CHA 50 S E-Beam

CHADeposition1 entry

CHA 50 S E-Beam Evaporator Deposition System.

Models in this family

  1. The CHA 50 S is an e-beam evaporator deposition system that includes a 5-pocket configuration, a Temescal CV 8 scan/beam controller, a Maxtech MDC 360 deposition monitor, and CTI 8-inch cryopumps with helium recharge units.