Waferpedia

CHA

50 S E-Beam

DepositionCHA 50 S E-Beam family
Research Quality: 30% complete
50 S E-Beam — Inventory photo
Fig. 0150 S E-BeamInventory photo[1]

What is it?

The CHA 50 S is an e-beam evaporator deposition system that includes a 5-pocket configuration, a Temescal CV 8 scan/beam controller, a Maxtech MDC 360 deposition monitor, and CTI 8-inch cryopumps with helium recharge units.

What do the numbers mean?

Vacuum & pumping3

Vacuum pumps[1]
Accurate?
CTI 8" cry pumps with helium recharge units[1]
Accurate?
Vacuum pumps
CTI 8" cry pumps with helium recharge units[1]
Accurate?

Control & software2

Temescal CV 8 scan / beam controller[1]
Accurate?
Beam controller
Temescal CV 8 scan / beam controller[1]
Accurate?

Configuration & options4

5 pocket[1]
Accurate?
Maxtech MDC 360 deposition monitor[1]
Accurate?
Number of pockets
5[1]
Accurate?
Deposition monitor
Maxtech MDC 360[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationVacuum pumps[1]
  • ConfigurationCTI 8" cry pumps with helium recharge units[1]
  • Vacuum pumpsCTI 8" cry pumps with helium recharge units[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What beam controller is used on the CHA 50 S?

The system uses a Temescal CV 8 scan and beam controller.[1]

What type of vacuum pump is used on the CHA 50 S?

The system uses a CTI eight-inch cryopump with helium recharge units.[1]

Not publicly documented

The following facts about the 50 S E-Beam are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 50 S E-Beam are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 50 S E-Beam are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 50 S E-Beam are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 50 S E-Beam are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 50 S E-Beam is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Aug 14, 2026.

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