Waferpedia

Tool family

CHA Mark 50

CHADeposition3 entries
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Models in this family

  1. Mark 50
  2. Mark 50 E-Beam
  3. Mark 50 Vacuum

    The CHA Mark 50 Vacuum Evaporator is a vacuum evaporator with 3 phase, 208 VAC, 60 Hz, and 175 amps specified.

All entries

  1. Mark 50CHA
    CategoryDeposition
    4 specs
  2. Mark 50 E-BeamCHA
    CategoryDeposition
    10 specs
  3. Mark 50 VacuumCHA

    The CHA Mark 50 Vacuum Evaporator is a vacuum evaporator with 3 phase, 208 VAC, 60 Hz, and 175 amps specified.

    CategoryDeposition
    4 specs