Tool family
CHA SE-600
The CHA SE-600 is a sputtering system identified in sources as a 6-inch system.
Models in this family
The CHA SE-600 is a sputtering system in the Deposition category for 6-inch wafers.
Tool family
The CHA SE-600 is a sputtering system identified in sources as a 6-inch system.
The CHA SE-600 is a sputtering system in the Deposition category for 6-inch wafers.
