Waferpedia

Tool family

CHA SE 600 High Vacuum E-Beam Evaporation

CHADeposition1 entry

CHA SE 600 High Vacuum E-Beam Evaporation System.

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Models in this family

  1. SE 600 High Vacuum E-Beam Evaporation

    The CHA SE 600 High Vacuum E-Beam Evaporation System is a deposition tool configured for 3 in. diameter wafers.