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CHA

SE 600 High Vacuum E-Beam Evaporation

SE 600 High Vacuum E-Beam Evaporation — Inventory photo
Fig. 01SE 600 High Vacuum E-Beam EvaporationInventory photo[1]

What is it?

The CHA SE 600 High Vacuum E-Beam Evaporation System is a deposition tool configured for 3 in. diameter wafers.

What do the numbers mean?

Power & electrical1

Temescal CV-8 E-Beam power supply with controls[1]
Accurate?

Vacuum & pumping1

Varian VHS-6 diffusion pump for high vacuum[1]
Accurate?

Wafer handling1

Triple dome planetary fixturing currently configured for 3 in. diam. wafers[1]
Accurate?

Performance1

Inficon IC6000 crystal deposition rate monitor[1]
Accurate?

Control & software1

Four pocket E-gun with manual rotation control[1]
Accurate?

Configuration & options3

19 in. dia. water cooled bell jar[1]
Accurate?
Automatic valve sequencer[1]
Accurate?
Does not have auto pocket sequencer, manual only[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationTemescal CV-8 E-Beam power supply with controls[1]
  • ConfigurationVarian VHS-6 diffusion pump for high vacuum[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the SE 600 High Vacuum E-Beam Evaporation are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SE 600 High Vacuum E-Beam Evaporation are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the SE 600 High Vacuum E-Beam Evaporation are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SE 600 High Vacuum E-Beam Evaporation are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SE 600 High Vacuum E-Beam Evaporation are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SE 600 High Vacuum E-Beam Evaporation is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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