Waferpedia

Tool family

CHA SSC-600

CHADeposition1 entry

The CHA SSC-600 is a sputtering system described as a 6-inch system that supports sputter up or sputter down operation.

Models in this family

  1. The CHA SSC-600 is a sputtering system described as a 6-inch system that supports sputter up or sputter down operation.