CHA

SSC-600

Deposition 6 in. system CHA SSC-600 family

Research Quality: 40% complete

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SSC-600 — web.archive.org — Fig. 01SSC-600web.archive.org^[1]

Wafer size

6 in. system

Power

Up to four DC or RF cathodes^[1]

How it works

The SSC-600 incorporates upper and lower baseplates for sputter up or sputter down operations. The system can be provided with up to four DC or RF cathodes.^[1]

System features include a single-plane, multi-substrate rotating fixture and computer control.^[1]

What do the numbers mean?

Power & electrical1

Cathodes: Up to four DC or RF cathodes^[1]

Wafer handling2

Wafer size: 6 in. system^[1]
Fixture: Single plane, multi substrate rotating fixture^[1]

Control & software1

Control: Computer control^[1]

Configuration & options3

System type: Sputtering System^[1]
Operation: Sputter up or sputter down operations^[1]
Baseplates: Upper and lower baseplates^[1]

Interested in this tool?

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What replaced it?

siblingCHA SSC-1000— Listed alongside the SSC-600 in CHA system pages.source^[2]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

CathodesUp to four DC or RF cathodes^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the SSC-600 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SSC-600 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SSC-600 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SSC-600 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SSC-600 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SSC-600 is not on record.
Answerable by: an OEM datasheet or a fab qualification report