Tool family
Denton Vacuum 635
The Denton Vacuum 635 is a sputter deposition tool with four confocal cathodes, an 8-inch diameter stage, and configurable DC, RF, and reactive sputtering capabilities.
Models in this family
The Denton Vacuum 635 is a sputter deposition tool with four confocal cathodes, an 8-inch diameter stage, and configurable DC, RF, and reactive sputtering capabilities.
