Waferpedia

Tool family

Denton Vacuum SJ20C

Denton VacuumDeposition1 entry

The Denton SJ20C is an e-beam evaporation tool used as a film thickness monitor and deposition controller.

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Models in this family

  1. SJ20C

    The Denton SJ20C is an e-beam evaporation tool used as a film thickness monitor and deposition controller.