Waferpedia

Tool family

Disco DCS

DiscoWet Processing / Clean2 entries
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Models in this family

  1. DCS 1440 Wafer Cleaner Spin
  2. DCS 1460 Wafer Cleaner Spin

    The DISCO DCS1460 is an automatic cleaning system for Φ300 mm wafers used to clean workpieces that have been cut on a dicing saw.

All entries

  1. DCS 1440 Wafer Cleaner SpinDisco
    CategoryWet Processing / Clean
    5 specs
  2. DCS 1460 Wafer Cleaner SpinDisco

    The DISCO DCS1460 is an automatic cleaning system for Φ300 mm wafers used to clean workpieces that have been cut on a dicing saw.

    CategoryWet Processing / Clean
    10 specs